Research Equipment

Scientific-Technological Complex NT-MDT NanoFab-100 (2011)

The complex consists of:

• Magnetron sputtering module
• Secondary ion mass spectrometer module
• Ion implantation module
• Plasma dry etching module

 

Scanning Electron Microscope TESCAN MIRA3 LMU (2019)

The microscope consists of:

• Energy-dispersive X-ray spectrometer (EDS)
• Electron backscatter diffraction system (EBSD)
• Cathodoluminescence (CL) detector
• Peltier table in combination with low vacuum and water vapor injection

 

Scanning Electron Microscope JEOL JSM 6510-LV (2011)

The microscope consists of:

• Energy-dispersive X-ray spectrometer (EDS)
• Lithographic attachment

 

Probe Microscope NT-MDT NTegra Aura

• Atomic force microscopy
• Tunnel microscopy
• Ability to work under vacuum conditions

Equipment for electron microscopy sample preparation 

• Automated carbon sputter coating system JEOL JEC-570
• Automated metal sputter coating system Quorum Q 150R

Equipment for electrical measurements of discrete devices and integrated circuits 

• Oscilloscopes (including 4-channel oscilloscope Tektronix TDS2024С)
• Voltage and current source measurement unit Keithley 2400 
• Arbitrary Waveform Generator Tektronix AFG3052C 
• Picoammeter Keithley 6485